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SOI Technology


SOI Technology: An Opportunity for RF Designers?

FREE-DOWNLOAD [PDF] JP Raskin – 40th European Solid-State Device Research …, 2010
Substrate resistivity values higher than 1 kO cm can easily be achieved and high
resistivity silicon (HRS) is commonly foreseen as a promising substrate for radio
frequency integrated circuits (RFIC) and mixed sig- nal applications





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