# DEEP SUB MICRON CMOS TECHNOLOGY LECTURE NOTES

DEEP SUBMICRON (DSM) CMOS TECHNOLOGY LECTURE ORGANIZATION

Outline

• Characteristics of a deep submicron CMOS technology

• Typical deep submicron CMOS technology

• Summary

If the n+ to p+ spacing is large, the Bird’s beak can be compensated using techniques

such as poly buffered LOCOS

• At some point as the n+ to p+ spacing gets smaller, the restricted bird’s beak leads to

undesirable stress effects in the transistor.

• An important advantage of STI is that it minimizes the heat cycle needed for n+ or p+

isolation compared to LOCOS. This is a significant advantage for any process where

there are implants before STI.

## Free download research paper

**Related**

COMMENTUncategorized